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Lam 9400 dfm

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LAM Etcher Refurbishment & Parts -- AAZ Equipment, Experts on …

Tīmeklis名稱: 9400 ESC(E-chuck) 說明： OEM and Second Source 9400 ES. Skip to content. ... Go Back to the Homepage / Lam Parts & For Sale / 9400 ESC(E-chuck) 名稱: 9400 … Tīmeklis2nd source new - amat/lam/tel/nvls p/n description process model material size 0020-20114 isolator dc bios. pvd endura 5500: al2o3 99.5% 0020-20126 stand off ceramic dc bios: pvd endura 5500: al2o3 99.5% 0020-20245 housing double rf coil: al2o3 99.5% 8" 0020-20521 spacer insulator lifter: burner email address for anonymous email https://nextdoorteam.com

LAM RESEARCH IGS 익숙한 판매용 가격 #9157986 > 사다 from CAE

TīmeklisAt Bridge Tronic Global, we have 'Lam Tcp 9400 Dfm Poly Etch 8240' available for sale. Please contact us at [email protected] or + 1-949-396-1395. Lam-Tcp-9400 … TīmeklisHERCULES®Evaluation Lam TCP 9400 PTX Problems and Points of Interest complex and costly wet clean procedure + conditioning no dedicated tools (nitride, poly, product mix) no conditioning between poly and nitride implemented process / chamber stability / WAC tool failure / fault detection 13.4.2004 D.Föh 7 Wet Clean Procedure + … TīmeklisVACUUM CHAMBER PM TECHNIQUE - Foamtec Intl WCC burner email account list

TCP-9400 DFM Etcher / Asher by Lam Research - Equipment

Category:Lam Research LAM Alliance A6 TCP 9400 DFM (RIE/TCP)

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Lam 9400 dfm

Used 9400 Etch for sale. Lam Research equipment & more

Tīmeklis716-331157-013 Lam Research 9400 DFM Disk, Interferometer, Top Gas Brand: 161: 716-402452-001 Lam Research Quartz 8″ Jeida Ring: 162: 716-443083-004 Lam Research Top Confinement Ring, 163: 716-443086-408 Lam Research Hot Edge Ring: 164: 716-443179-102 Lam Research Edge Ring, Base Brand: 165: TīmeklisLAM RESEARCH: TCP 9600 SE #9226415 ETCHERS / ASHERS Metal etcher, 8" Gas box MFC Temperature controller Process kit: EPD Sensor Chuck type: Mechanical (... 細節 LAM RESEARCH: TCP 9600 SE #9228025 ETCHERS / ASHERS Etchers, 8" Control system: EnVision CPU: 586 Processor HINE 38A Indexers Process …

Lam 9400 dfm

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http://www.semistarcorp.com/product/lam-research-equipment-and-parts-2/ Tīmeklis2002. gada 5. jūn. · ABSTRACT Photoresist and oxide masked polysilicon samples were etched in a Lam TCP 9400SE, using both Cl 2 and HBr discharges. A three variable (inductive power/rf bias power/flow rate) fractional factorial set of experiments was performed for the photoresist and oxide masked polysilicon samples.

TīmeklisLAM Alliance TCP 9400 DSiE PROCESS MODULES (PM) ... (PM) LAM Alliance TCP 9400 DFM PROCESS MODULES (PM) LAM Alliance TCP 9600 DFM PROCESS MODULES (PM) LAM Alliance TCP 9400 PTX PROCESS MODULES (PM) LAM Alliance TCP 9600 PTX PROCESS MODULES (PM) AAZ Equipment. Bay Area / … TīmeklisDetails for TCP-9400 DFM Etcher / Asher by Lam Research. Contact FabExchange for more information on the TCP-9400 DFM Etcher / Asher for sale. This TCP-9400 …

Tīmeklis1996. gada 26. febr. · Listing description. LAM Research Alliance (A4) TCP 9400DFM. Model: Alliance 4.1 4520XL/9400/XL. Software: A1.1.1-A1-004. Vintage: Feb 26, …

TīmeklisModel: LAM TCP9400 SE. Category: Plasma Etch. Original Equipment Manufacturer: Lam Research. Condition: Cold Shut down, Complete,Working. Process: POLY …

Tīmeklis© 2024 lam research corporation. all rights reserved. ... burner email websiteTīmeklisLAM 9600 WITH ENDPOINT DETECTION FROM LAM MANUFACTURER: LAM RESEARCH Model: 9600 Description: The Lam 9600 is intended to etch aluminum metal and TiW layers with highly vertical sidewalls suitable for 0.35 um line width. The plasma is a medium-high density transformer coupled plasma, similar to ICP … burner emails freeTīmeklisESCT provides the following new products for LAM chambers; The ESC for 4520-Excelan has much better backside cooling and no wafer sticking. Better backside He … burner energy and transportationTīmeklisWe support all 4 generations of LAM legacy etchers, mostly in 150MM (6”), and 200MM (8”) technologies, and less commonly the 100MM (4”) and 125MM (5”). We supply … burner email with inboxTīmeklisProducts. 所有集成电路生产都需要利用刻蚀技术形成芯片中错综复杂的各式结构。. 在微机电系统（MEMS）生产工艺中，刻蚀技术则被用于刻出形式多样的形貌，从而形成特定的物理结构，如大空腔和高深宽比 （HAR） 深沟槽。. 泛林集团DSiE™产品系列为多种 … burner express 2017 promotional codeTīmeklis2014. gada 11. aug. · LAM Alliance A6 TCP 9400DFM Poly Etch System. • Currently Configured for 200mm Wafer Sizes. • MFG Date: 2000. • Install Type: Through-the-wall (TTW) • CE Marked. • M/F Type: Alliance A6. • Software Type: Envision. • Cassette Interface: o Standard Loadlocks, Open Cassette. burner engineering research laboratoryTīmeklis2011. gada 28. jūl. · TCP 9400 operation manauls 文档格式： .pdf 文档大小： 568.71K 文档页数： 17 页 顶 /踩数： 0 / 0 收藏人数： 4 评论次数： 0 文档热度： 文档分类： 待分类 文档标签： TCP9400 Lam wafer step process etch recipe not Button Page 系统标签： lam etch manual recipe etcher microlab hama freedom light bluetooth tws слушалки